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Picometer-Resolution MEMS Segmented DM

Award Information

Agency:
National Aeronautics and Space Administration
Branch:
N/A
Award ID:
Program Year/Program:
2012 / SBIR
Agency Tracking Number:
104554
Solicitation Year:
2010
Solicitation Topic Code:
S2.02
Solicitation Number:
Small Business Information
Iris AO, Inc.
2680 Bancroft Way Berkeley, CA 94704-1717
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2012
Title: Picometer-Resolution MEMS Segmented DM
Agency: NASA
Contract: NNX12CA42C
Award Amount: $750,000.00
 

Abstract:

Microelectromechanical systems (MEMS) technology has the potential to create deformable mirrors (DM) with 10^4 actuators that have size, weight, and power specifications that are far lower than conventional piezoelectric and electrostrictive DMs. However, building a MEMS DM with a relatively large aperture that is flat in the unpowered state is challenging. Currently, a large portion of the mirror stroke must be used to flatten the MEMS DMs. In the case of the large-stroke segmented MEMS DMs manufactured by Iris AO, there is sufficient stroke for wavefront correction after flattening. However, the resolution is significantly reduced because the dynamic range of the digital-to-analog converters (DAC) used to operate the DM is spread over multiple microns of stroke rather than the 0.5 micron range required for a coronagraph. This Phase I SBIR will make substantial improvements in the fabrication process of MEMS segmented DMs that reduce the deleterious residual surface-figure errors. It will do so by systematically addressing the sources of the segment position variations as well as addressing low-spatial frequency chip bow that can result in large peak-to-valley deformations across the DM array. The Iris AO DM architecture will also be modified to enable picometer resolution actuation with ultra-precision drive electronics.

Principal Investigator:

Michael Helmbrecht
Principal Investigator
5108492375
michael.helmbrecht@irisao.com

Business Contact:

Michael Helmbrecht
Business Official
5108492375
michael.helmbrecht@irisao.com
Small Business Information at Submission:

Iris AO, Inc.
2680 Bancroft Way Berkeley, CA 94704-1717

EIN/Tax ID: 043693091
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No