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SBIR Phase II: Novel Slurry Injector Device for Chemical Mechanical…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
Program Year/Program:
2012 / SBIR
Agency Tracking Number:
1152253
Solicitation Year:
2012
Solicitation Topic Code:
NM
Solicitation Number:
Small Business Information
Araca, Inc.
2550 E River Rd, Suite 12204 Tucson, AZ 85718-9525
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 2012
Title: SBIR Phase II: Novel Slurry Injector Device for Chemical Mechanical Planarization Application
Agency: NSF
Contract: 1152253
Award Amount: $500,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase II project aims to develop a novel slurry injection device for applications in chemical mechanical planarization (CMP), a key technology for integrated circuit (IC) manufacturing. Different from the current slurry application method that applies slurry on the pad center area during wafer polishing, this novel slurry injector device is placed on top of the pad surface, injects the fresh slurry to where it is needed, and reduces slurry mixing and dilution effects by blocking used slurry, pad debris, and rinsing water from re-entering the pad-wafer interface. Tests will be performed on various polishers to optimize the slurry injector device design for different CMP processes. This slurry injector device is expected to achieve higher material removal rates and reduce polishing defects compared to current pad center area slurry application method. The broader/commercial impacts of this project will be the potential to reduce slurry consumption and increase yield during CMP processes for the IC manufacturing industry. In 2012, the global point-of-use slurry usage is estimated to be in excess of 600 million liters corresponding to a total slurry expenditure of approximately $1 billion. Assuming a conservative slurry savings of 15 percent by this slurry injector device, it represents a potential $150 million savings in slurry and an additional $25 million savings in waste treatment.

Principal Investigator:

Yun Zhuang
5203314751
yunzhuang@aracainc.com

Business Contact:

Yun Zhuang
5203314751
yunzhuang@aracainc.com
Small Business Information at Submission:

Araca, Inc.
2550 E River Rd, Suite 12204 Tucson, AZ 85718-9525

EIN/Tax ID: 201632377
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No