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A high sensitive MEMS micro-gyroscope

Award Information

Department of Defense
Award ID:
Program Year/Program:
2012 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Agiltron, Inc.
15 PRESIDENTIAL WAY Woburn, MA 01801-1040
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2012
Title: A high sensitive MEMS micro-gyroscope
Agency: DOD
Contract: M67854-12-C-6504
Award Amount: $149,893.00


Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS microgyroscope with a simple scalable mechanism and high precision. The gyroscope will be fabricated in a MEMS structure, with a novel design concept that maximizes the resonant frequency difference between the driving and sensing mode, tuning the sensing mode to near free floating state. This will result in a sensor with unparalleled performance on low noise and bias stability, and provide a unique solution for cost-effective mass production. Being a sealed MEMS device, the gyroscope will be able to withstand severe environmental conditions in hand-held laser rangefinders. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design and sensor fabrication.

Principal Investigator:

Amit Ghosh
Senior MEMS Engineer
(508) 770-2061

Business Contact:

Amanda Contardo
Contracts Administrator
(781) 935-1200
Small Business Information at Submission:

Agiltron Corporation
15 Presidential Way Woburn, MA -

EIN/Tax ID: 043539587
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No