A sensitive survivable MEMS accelerometer
Leveraging on our experience in MEMS component and sensor system fabrication, Agiltron proposes to realize a new type of MEMS accelerometer that will not only survive the extreme accelerations outlined in the SBIR topic (shock at least 40,000 g in all axes, high electromagnetic fields (E>5,000 V/m, B>2 T), and surface temperatures of>800 deg C), but will also provide measurement from initial launch and maintain performance after the excitation with a simple scalable mechanism and high precision. In the Phase I program, the feasibility of the proposed accelerometer technology will be demonstrated through both design simulation and sensor fabrication.
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