Advanced Ceramic Materials and Packaging Technologies For Sensors Operable 1800C in Advanced Energy Generation Systems
There is a need for condition monitoring sensors capable of function in the harshest environments associated with advanced power systems that will: directly contribute to improving system control, protect capital equipment investment, and promote safety through prevention of catastrophic equipment failure. These harsh environments include extreme temperatures (8001800C), high pressures (5001000 psi), and highly corrosive/erosive exposures. However, it has been a challenge to develop sensors that can endure these harsh environments. Sporian Microsystems has previously developed a MEMS sensor technology for high temperature power system applications. Sporians sensor technology is based on the combination of advance high temperature packaging and recently developed silicon carbide nitride (SiCN) based polymer derived ceramics (PDCs), which possess excellent mechanical and electric properties at high temperatures up to 1800oC. Sporian proposes to develop alternative precursors, processes, packaging materials, and methods to extend the current operational capabilities of Sporians sensor technology beyond current limits to 16001800oC. In Phase I, Sporian worked with OEMs to identify desirable applications/implementations for the technology, evaluated/demonstrated new materials synthesis and microfabrication methods, developed new packaging methods and designs, and experimentally demonstrated initial prototype sensor structures at application relevant temperatures. Based on the results of Phase I, the Phase II will include: continued work with OEMs, the development of two application specific sensor implementations, materials/process optimization, several rounds of full system prototyping, rigorous lab scale testing, and final test/demonstration in OEM application relevant environment test systems. Commercial Applications and Other Benefits: There is an established consensus that advanced sensing systems will be essential to achieving the cost and performance targets in advanced power systems. The resultant products, high temperature, internally calibrated, temperature compensated, temperature/pressure multisensors, would be in demand for energy generation and propulsion designers and operators and there is a significant market opportunity. Equipment that could potentially benefit from the development of such a sensor technology include coal gasifiers, turbines, advanced coal combustion systems, and other critical or high maintenance equipment commonly employed in energy and power generation systems. Generating asset OEMs, utilities, and end users will all stand to benefit from these highefficiency, low emissions power systems.
Small Business Information at Submission:
Sporian Microsystems, Inc.
515 Courtney Way - Suite B Lafayette, CO 80026-8821
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