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MEMS Lamellar Based Interferometer for the Detection of Toxic Chemicals

Award Information

Agency:
Department of Defense 		Branch:
Office for Chemical and Biological Defense 		Award ID:
96631 		Program Year/Program:
2010 / SBIR
Agency Tracking Number:
C101-104-0089 		Solicitation Year:
N/A 		Solicitation Topic Code:
CBD 10-104 		Solicitation Number:
N/A
Small Business Information
EPIR Technologies Inc
590 Territorial Drive, Suite B Bolingbrook, IL -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2010
Title: MEMS Lamellar Based Interferometer for the Detection of Toxic Chemicals
Agency / Branch: DOD / CBD
Contract: W911SR-10-C-0049
Award Amount: $69,999.00
 

Abstract:

In order to satisfy the DOD and commercial needs for the detection and identification of chemical warfare agents, toxic industrial chemicals or biological compounds, we propose a compact, low-cost sensor based on the integration of HgCdTe photodiode detection technology with micro-opto-electromechanical systems (MOEMS) technology, which matches HgCdTe's sensitivity with an inexpensive microscale MOEMS lamellar grating interferometer (LGI) device. The sensor is operated in stand-off mode and has longer lifetimes than those obtained in conventional solid state sensors based on chemo-sensitive layers. We will fabricate LGI devices operated in short and mid IR wavelength ranges using a modified Silicon-On-Insulator (SOI) process. Prior work has used SOI processing but the deep reactive ion etch (DRIE) used to pattern the thick silicon layer has led to significant roughness on the optical surfaces leading to performance limitations associated with the resulting variability in the optical path length difference. We will use an oxidation and strip process to minimize residual roughness left on the optical surfaces after the DRIE etch step. We have used this processing successfully to remove related sidewall roughness on silicon waveguides and we estimate a final roughness of 0.5 nm in the gratings, suitable for short and mid-IR operation of the fabricated LGIs.

Principal Investigator:

Silviu Velicu
Director R&D
6307710203
svelicu@epir.com

Business Contact:

Sivalingam Sivananthan
President and CEO
6307710201
ssivananthan@epir.com
Small Business Information at Submission:

EPIR Technologies Inc
590 Territorial Drive, Suite B Bolingbrook, IL 60440

EIN/Tax ID: 364196918
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No