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In-Situ Monitoring during HVPE for the Producibility of Semi-Insulating GaN

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
94836
Program Year/Program:
2010 / STTR
Agency Tracking Number:
B09B-001-0060
Solicitation Year:
N/A
Solicitation Topic Code:
MDA 09T001
Solicitation Number:
N/A
Small Business Information
Kyma Technologies, Inc.
8829 Midway West Road Raleigh, NC -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2010
Title: In-Situ Monitoring during HVPE for the Producibility of Semi-Insulating GaN
Agency / Branch: DOD / MDA
Contract: HQ0006-10-C-7399
Award Amount: $99,969.00
 

Abstract:

This program will utilize in-situ monitoring devices during the HVPE growth of GaN in conjunction with thermal and gas flow modeling, to establish tighter tolerances over growth variables such as substrate temperature and growth rate, which will lead to more robust, producible HVPE GaN growth processes, and in turn increase large area wafer yield and boule thicknesses. The in-situ monitoring devices which will be used are a Laytec EpiTT 3-wavelength pyrometer to directly measure substrate temperature throughout the GaN HVPE process, and a deep UV source/spectrometer that will be used to monitor the GaCl precursor concentration above the growing GaN surface. These tools will help establish a robust, producible GaN HVPE process capable of producing large area bulk wafers and boules of thicknesses 1 cm and greater.

Principal Investigator:

Robert Metzger
Chief Engineer
9197898880
metzger@kymatech.com

Business Contact:

Keith Evans
CEO
9197898880
evans@kymatech.com
Small Business Information at Submission:

Kyma Technologies, Inc.
8829 Midway West Road Raleigh, NC 27617

EIN/Tax ID: 562089207
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
University of Nevada at Las Vegas
4505 S Maryland Pkwy
Las Vegas, NV 89183
Contact: Rama Venkat
Contact Phone: 7028951094