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Company Information:

Company Name: Environmental Metrology Corporation
City: Tucson
State: AZ
Zip+4: 85704-
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $99,998.00 1
SBIR Phase II $470,050.00 1

Award List:

SBIR Phase I: Novel Sensor for Control of Cleaning Processes During the Fabrication of Microstructures

Award Year / Program / Phase: 2004 / SBIR / Phase I
Agency: NSF
Principal Investigator: Bert Vermeire, PI – (520) 742-3300
Award Amount: $99,998.00
Abstract:
This Small Business Innovation Research (SBIR) Phase I project provides a unique and robust in-situ sensor for detection and control of impurities in microstructures and porous layers associated with manufacturing of semiconductor, MEMS and emerging nano devices. Use of impedance as a measure of… More

SBIR Phase II: Novel Sensor for Control of Cleaning Processes During the Fabrication of Microstructures

Award Year / Program / Phase: 2006 / SBIR / Phase II
Agency: NSF
Principal Investigator: Bert Vermeire, Mr – (520) 742-3300
Award Amount: $470,050.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project provides a unique and robust in-situ sensor for detection and control of impurities in microstructures and porous layers associated with manufacturing of semiconductor, MEMS, and emerging nanodevices. Use of impedance as a measure of… More