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Company Information:

Company Name:
Environmental Metrology Corporation
Address:
6595 North Oracle Road
Suite 153B
Tucson, AZ 85704-
Phone:
N/A
URL:
N/A
EIN:
333333333
DUNS:
333333333
Number of Employees:
3
Woman-Owned?:
No
Minority-Owned?:
No
HUBZone-Owned?:
No

Commercialization:

Has been acquired/merged with?:
N/A
Has had Spin-off?:
N/A
Has Had IPO?:
N/A
Year of IPO:
N/A
Has Patents?:
N/A
Number of Patents:
N/A
Total Sales to Date $:
$ 0.00
Total Investment to Date $
$ 0.00
POC Title:
N/A
POC Name:
N/A
POC Phone:
N/A
POC Email:
N/A
Narrative:
N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $99,998.00 1
SBIR Phase II $470,050.00 1

Award List:

SBIR Phase I: Novel Sensor for Control of Cleaning Processes During the Fabrication of Microstructures

Award Year / Program / Phase:
2004 / SBIR / Phase I
Award Amount:
$99,998.00
Agency:
NSF
Principal Investigator:
Bert Vermeire, PI – (520) 742-3300
Abstract:
This Small Business Innovation Research (SBIR) Phase I project provides a unique and robust in-situ sensor for detection and control of impurities in microstructures and porous layers associated with manufacturing of semiconductor, MEMS and emerging nano devices. Use of impedance as a measure of… More

SBIR Phase II: Novel Sensor for Control of Cleaning Processes During the Fabrication of Microstructures

Award Year / Program / Phase:
2006 / SBIR / Phase II
Award Amount:
$470,050.00
Agency:
NSF
Principal Investigator:
Bert Vermeire, Mr – (520) 742-3300
Abstract:
This Small Business Innovation Research (SBIR) Phase II project provides a unique and robust in-situ sensor for detection and control of impurities in microstructures and porous layers associated with manufacturing of semiconductor, MEMS, and emerging nanodevices. Use of impedance as a measure of… More