USA flag logo/image

An Official Website of the United States Government

Company Information:

Company Name: Lumarray LLC
City: Cambridge
State: MA
Zip+4: -
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase II $1,559,217.00 1

Award List:

Nanometer Precision in Maskless Lithography via Software

Award Year / Program / Phase: 2010 / SBIR / Phase II
Agency / Branch: DOD / DARPA
Principal Investigator: Henry Smith, President – (617) 253-6865
Award Amount: $1,559,217.00
Abstract:
LumArray, Inc. proposes under Phase II to further improve its maskless zone-plate-array lithography system, to meet the requirements of manufacturers of custom chips for the DoD. Under Phase I, a prototype alpha tool was developed, the ZP-150ATM. Under Phase II we will develop and demonstrate a beta… More