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Company Information:

Company Name:
Lumarray LLC
Address:
60 Vassar Street
Bldg. 39, Room 427
Cambridge, MA
Phone:
N/A
URL:
EIN:
550815121
DUNS:
135947088
Number of Employees:
6
Woman-Owned?:
No
Minority-Owned?:
No
HUBZone-Owned?:
No

Commercialization:

Has been acquired/merged with?:
N/A
Has had Spin-off?:
N/A
Has Had IPO?:
N/A
Year of IPO:
N/A
Has Patents?:
N/A
Number of Patents:
N/A
Total Sales to Date $:
$ 0.00
Total Investment to Date $
$ 0.00
POC Title:
N/A
POC Name:
N/A
POC Phone:
N/A
POC Email:
N/A
Narrative:
N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase II $1,559,217.00 1

Award List:

Nanometer Precision in Maskless Lithography via Software

Award Year / Program / Phase:
2010 / SBIR / Phase II
Award Amount:
$1,559,217.00
Agency / Branch:
DOD / DARPA
Principal Investigator:
Henry Smith, President – (617) 253-6865
Abstract:
LumArray, Inc. proposes under Phase II to further improve its maskless zone-plate-array lithography system, to meet the requirements of manufacturers of custom chips for the DoD. Under Phase I, a prototype alpha tool was developed, the ZP-150ATM. Under Phase II we will develop and demonstrate a beta… More