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Nanometer Precision in Maskless Lithography via Software

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
2010 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
DARPA 07-035
Solicitation Number:
Small Business Information
LumArray, Inc.
15 Ward Street Somerville, MA -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 2
Fiscal Year: 2010
Title: Nanometer Precision in Maskless Lithography via Software
Agency / Branch: DOD / DARPA
Contract: W91CRB-10-C-0113
Award Amount: $750,000.00


LumArray, Inc. proposes under Phase II to further improve its maskless zone-plate-array lithography system, to meet the requirements of manufacturers of custom chips for the DoD. Under Phase I, a prototype alpha tool was developed, the ZP-150ATM. Under Phase II we will develop and demonstrate a beta tool, the ZP-150BTM, which will have features beyond those available on the alpha tool. Specifically, the ZP-150BTM will have: (1) exposure-dose monitoring and correction of exposure-dose errors; (2) enhanced throughput by virtue of multiple spatial-light modulators, variable spot size, and improved spatial-light modulation; (3) higher-speed computation via a graphics processing unit (GPU); and (4) revisions to support these added functionalities. The ZP-150BTM will be designed for compatibility with future improvements in resolution afforded by absorbance-modulation optical lithography, a LumArray invention. LumArray's maskless lithograpy systems are compatible with both mask making and direct writing on substrates. These systems will radically streamline and speed up the design and manufacture of custom circuits, especially those manufactured in low volume for the DoD. This in turn will enhance the capability and responsiveness of military systems.

Principal Investigator:

Henry Smith

Business Contact:

Nicholas Economou
Small Business Information at Submission:

Lumarray LLC
60 Vassar Street Bldg. 39, Room 427 Cambridge, MA 02139

EIN/Tax ID: 202394522
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No