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Company Information:
Name:
Abek Inc.
Address:
815 North Wooten Road
Colorado Springs, CO 80915
Colorado Springs, CO 80915
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
No
URL:
N/A
Phone:
(303) 506-3509
Award Totals:
Award List:
LITHOGRAPHY USING CONVENTIONAL, COMMERCIAL RESIST SYSTEMS
Award Year / Program / Phase:
1984 / SBIR / Phase I
Agency:
NSF
Principal Investigator:
Salvatore p. diiorio , INVESTIGATOR
Award Amount:
$40,000.00
Abstract:
By optimizing conditions, conventional electron beam by optimizing conditions, conventional electron beam resists, such as pbs, can be used to produce geometries in the 0.3 to 0.5 micron range in a controlled manner, using raster scan writing techniques in a limited production environment. in order… More