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DEVELOPMENT OF A DEEP ULTRAVIOLET PELLICLE FOR SUBMICRON I.C. LITHOGRAPHY

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
12145
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
12145
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Act Inc
B.f.t.c. South Mountain Dr Bethlehem, PA 18015
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: DEVELOPMENT OF A DEEP ULTRAVIOLET PELLICLE FOR SUBMICRON I.C. LITHOGRAPHY
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

N/A

Principal Investigator:

Dr Irl E Ward
2158616921

Business Contact:

Small Business Information at Submission:

Act Inc
B.f.t.c. South Mountain Dr Bethlehem, PA 18015

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No