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NON-CONTACT NON-INVASIVE SMART IR SENSOR FOR IN-SITU DIAGNOSTICS IN CVD REACTORS

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
17169
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
17169
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
ACT Research Corporation
16 Walnut Street, Suite 43 Arlington, MA 02174
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Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: NON-CONTACT NON-INVASIVE SMART IR SENSOR FOR IN-SITU DIAGNOSTICS IN CVD REACTORS
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $52,016.00
 

Abstract:

A NOVEL NON-CONTACT NON-INVASIVE INFRARED (IR) SENSOR IS PROPOSED FOR IN-SITU DIAGNOSTICS IN CVD REACTORS. DURING CVD PROCESSES, THE SUBSTRATES WILL BE HEATED. THE IR SENSOR TAKES THE ADVANTAGE OF THE HEATED SUBSTRATE AS THE SOURCES OF IR RADIATION. BY SENSING AND ANALYZING THE IR RADIATION FROM A SUBSTRATE, THE SUBSTRATE SURFACE CAN BE PROBED. MOREOVER, LOW TEMPERATURE SILICON EPITAXY HAS BEEN CHOSEN AS THE TEST VEHICLE, AND THE NEEDS OF A SENSOR FOR MONITORING AND CONTROL OF CRITICAL PARAMETERS IN AN EPITAXIAL CVD REACTOR WILL BE IDENTIFIED. OUR GOAL IS TO ASSESS THE FEASIBILITY OF THIS IR SENSOR FOR PROBING SEMICONDUCTOR SURFACES. AND EXAMINE THE POSSIBILITIES OF USING THIS SENSOR TO FULFILL THE MONITORING NEED IN EPITAXIAL CVD PROCESSES. AFTER SUCCESSFUL DEMONSTRATION OF THE PHASE I RESEARCH, THE NOVEL SENSOR WILL BE INCORPORATED INTO CANDIDATE MANUFACTURING TOOLS FOR REAL-TIME PROCESS MONITORING AND CONTROL. THE SMART SENSOR OFFERS MORE FLEXIBILITIES IN CONTROLLING CRITICAL MANUFACTURING PROCESSES TO MEET THE STRINGENT REQUIREMENTS OF THE FUTURE GENERATION OF DEVICES. IT CAN BE INTEGRATED IN THE FUTURE MANUFACTURING TOOL (CLUSTER TOOL) FOR REAL-TIME PROCESS MONITORING AND CONTROL.

Principal Investigator:


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Business Contact:

Small Business Information at Submission:

Act Research Corp
119 Harvard St #4 Cambridge, MA 02139

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No