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Company Information:

Company Name:
Lumeras
Address:
207-A McPherson St
Santa Cruz, CA 95060 0000
Phone:
(831) 421-0466
URL:
N/A
EIN:
770500917
DUNS:
808489566
Number of Employees:
1
Woman-Owned?:
No
Minority-Owned?:
No
HUBZone-Owned?:
No

Commercialization:

Has been acquired/merged with?:
N/A
Has had Spin-off?:
N/A
Has Had IPO?:
N/A
Year of IPO:
N/A
Has Patents?:
N/A
Number of Patents:
N/A
Total Sales to Date $:
$ 0.00
Total Investment to Date $
$ 0.00
POC Title:
N/A
POC Name:
N/A
POC Phone:
N/A
POC Email:
N/A
Narrative:
N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $200,000.00 2
SBIR Phase II $1,000,000.00 2
STTR Phase I $98,991.00 1

Award List:

SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system

Award Year / Program / Phase:
2004 / SBIR / Phase I
Award Amount:
$100,000.00
Agency:
NSF
Principal Investigator:
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More

SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system

Award Year / Program / Phase:
2005 / SBIR / Phase II
Award Amount:
$500,000.00
Agency:
NSF
Principal Investigator:
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More

Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication

Award Year / Program / Phase:
2007 / STTR / Phase I
Award Amount:
$98,991.00
Agency / Branch:
DOD / DARPA
Principal Investigator:
Andrew Merriam, Chief Scientist
Research Institution:
SANDIA NATIONAL LABORATORIES
RI Contact:
Arlee Smith
Abstract:
Immersion lithography using available 193 nm optics and laser sources provides an attractive near-term path to reducing the printable feature sizes of integrated circuits by using a high-index fluid to reduce the wavelength at the wafer, rather than using light with higher photon energy and shorter… More

SBIR Phase I: Ultraviolet laser for ultra-high-resolution photoemission spectroscopy

Award Year / Program / Phase:
2007 / SBIR / Phase I
Award Amount:
$100,000.00
Agency:
NSF
Principal Investigator:
Abstract:
This Small Business Innovation Research Phase I project addresses an immediate need for a short-wavelength, narrow-bandwidth, high-brightness light source for ultra-high-resolution angle-resolved photoemission spectroscopy (ARPES). Low-photon-energy laser sources (~6 eV) have recently been applied… More

SBIR Phase II: Ultraviolet Laser for Ultra-high-resolution Photoemission Spectroscopy

Award Year / Program / Phase:
2009 / SBIR / Phase II
Award Amount:
$500,000.00
Agency:
NSF
Principal Investigator:
Abstract:
This Small Business Innovation Research Phase II project is to develop a shortwavelength, narrow-bandwidth, high-brightness photo-ionization laser; that can be used for used for ultra-high energy-resolution, angle-resolved photoemission spectroscopy (ARPES), and for single-photon-ionization (SPI) in… More