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Company Information:
Name:
Lumeras
Address:
207-A McPherson St
Santa Cruz, CA 95060 0000
Santa Cruz, CA 95060 0000
Located in HUBZone:
No
Woman-Owned:
No
Minority-Owned:
No
URL:
N/A
Phone:
(831) 421-0466
Award Totals:
Award List:
SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system
Award Year / Program / Phase:
2004 / SBIR / Phase I
Agency:
NSF
Principal Investigator:
Andrew J. Merriam, Dr
Award Amount:
$100,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More
SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system
Award Year / Program / Phase:
2005 / SBIR / Phase II
Agency:
NSF
Principal Investigator:
Andrew J. Merriam, Dr
Award Amount:
$500,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More
Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication
Award Year / Program / Phase:
2007 / STTR / Phase I
Agency / Branch:
DOD / DARPA
Research Institution:
SANDIA NATIONAL LABORATORIES
Principal Investigator:
Andrew Merriam, Chief Scientist
Award Amount:
$98,991.00
RI Contact:
Arlee Smith
Abstract:
Immersion lithography using available 193 nm optics and laser sources provides an attractive near-term path to reducing the printable feature sizes of integrated circuits by using a high-index fluid to reduce the wavelength at the wafer, rather than using light with higher photon energy and shorter… More
SBIR Phase I: Ultraviolet laser for ultra-high-resolution photoemission spectroscopy
Award Year / Program / Phase:
2007 / SBIR / Phase I
Agency:
NSF
Principal Investigator:
Andrew J. Merriam, PhD
Award Amount:
$100,000.00
Abstract:
This Small Business Innovation Research Phase I project addresses an immediate need for a short-wavelength, narrow-bandwidth, high-brightness light source for ultra-high-resolution angle-resolved photoemission spectroscopy (ARPES). Low-photon-energy laser sources (~6 eV) have recently been applied… More
SBIR Phase II: Ultraviolet Laser for Ultra-high-resolution Photoemission Spectroscopy
Award Year / Program / Phase:
2009 / SBIR / Phase II
Agency:
NSF
Principal Investigator:
Andrew J. Merriam, PhD
Award Amount:
$500,000.00
Abstract:
This Small Business Innovation Research Phase II project is to develop a shortwavelength, narrow-bandwidth, high-brightness photo-ionization laser; that can be used for used for ultra-high energy-resolution, angle-resolved photoemission spectroscopy (ARPES), and for single-photon-ionization (SPI) in… More