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Company Information:

Company Name: Lumeras
City: Santa Cruz
State: CA
Zip+4: 95060 0000
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Website URL: N/A
Phone: (831) 421-0466

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $200,000.00 2
SBIR Phase II $1,000,000.00 2
STTR Phase I $98,991.00 1

Award List:

SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system

Award Year / Program / Phase: 2004 / SBIR / Phase I
Agency: NSF
Principal Investigator: Andrew J. Merriam, Dr
Award Amount: $100,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More

SBIR Phase II: High-resolution, high-precision 193-nm photomask phase metrology system

Award Year / Program / Phase: 2005 / SBIR / Phase II
Agency: NSF
Principal Investigator: Andrew J. Merriam, Dr
Award Amount: $500,000.00
Abstract:
This Small Business Innovation Research (SBIR) Phase II project aims to design and construct an ultra-high-resolution, high-precision phase-shift integrated measurement system suitable for metrology of advanced phase-shifting photomasks. A number of semiconductor manufacturers now expect to… More

Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication

Award Year / Program / Phase: 2007 / STTR / Phase I
Agency / Branch: DOD / DARPA
Research Institution: SANDIA NATIONAL LABORATORIES
Principal Investigator: Andrew Merriam, Chief Scientist
Award Amount: $98,991.00
RI Contact: Arlee Smith
Abstract:
Immersion lithography using available 193 nm optics and laser sources provides an attractive near-term path to reducing the printable feature sizes of integrated circuits by using a high-index fluid to reduce the wavelength at the wafer, rather than using light with higher photon energy and shorter… More

SBIR Phase I: Ultraviolet laser for ultra-high-resolution photoemission spectroscopy

Award Year / Program / Phase: 2007 / SBIR / Phase I
Agency: NSF
Principal Investigator: Andrew J. Merriam, PhD
Award Amount: $100,000.00
Abstract:
This Small Business Innovation Research Phase I project addresses an immediate need for a short-wavelength, narrow-bandwidth, high-brightness light source for ultra-high-resolution angle-resolved photoemission spectroscopy (ARPES). Low-photon-energy laser sources (~6 eV) have recently been applied… More

SBIR Phase II: Ultraviolet Laser for Ultra-high-resolution Photoemission Spectroscopy

Award Year / Program / Phase: 2009 / SBIR / Phase II
Agency: NSF
Principal Investigator: Andrew J. Merriam, PhD
Award Amount: $500,000.00
Abstract:
This Small Business Innovation Research Phase II project is to develop a shortwavelength, narrow-bandwidth, high-brightness photo-ionization laser; that can be used for used for ultra-high energy-resolution, angle-resolved photoemission spectroscopy (ARPES), and for single-photon-ionization (SPI) in… More