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Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
83214
Program Year/Program:
2007 / STTR
Agency Tracking Number:
07ST1-0051
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Lumeras
207-A McPherson St Santa Cruz, CA 95060 0000
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2007
Title: Long Coherence Length 193 nm Laser for High-Resolution Nano-Fabrication
Agency / Branch: DOD / DARPA
Contract: W31P4Q-07-C-0262
Award Amount: $98,991.00
 

Abstract:

Immersion lithography using available 193 nm optics and laser sources provides an attractive near-term path to reducing the printable feature sizes of integrated circuits by using a high-index fluid to reduce the wavelength at the wafer, rather than using light with higher photon energy and shorter vacuum wavelength. An interferometric immersion lithography (IIL) tool has demonstrated rapid fabrication of grating structures with half-pitches of 35 nm over exposure areas of 0.5 mm. This Phase I project involves the design of a new fiber laser based 193 nm light source with very high spatial- and temporal-coherence to allow uniform high-contrast intensity fringes (35 nm HP) to illuminate a wafer surface over a substantially larger exposure area, on the order of one square cm per exposure site. In addition, the laser will have high power stability and be sufficiently robust to allow extended periods of operation with little maintenance or operator intervention.

Principal Investigator:

Andrew Merriam
Chief Scientist
8314409388
merriam@actinix.com

Business Contact:

James Jacob
President
8314409388
jjj@actinix.com
Small Business Information at Submission:

ACTINIX
229 Technology Circle Scotts Valley, CA 95066

EIN/Tax ID: 770500917
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Research Institution Information:
SANDIA NATIONAL LABORATORIES
Department 1118
MS 1423
Albuquerque, NM 87185 1423
Contact: Arlee Smith
Contact Phone: (505) 844-5810
RI Type: Federally funded R&D center (FFRDC)