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Company Information:

Company Name: 3d Informatics
City: Charlotte
State: NC
Zip+4: 28269
Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
Website URL: N/A
Phone: N/A

Award Totals:

Program/Phase Award Amount ($) Number of Awards
SBIR Phase I $49,646.00 1

Award List:

INTELLIGENT CONTROL OF SEMICONDUCTOR MANUFACTURING PROCESSES

Award Year / Program / Phase: 1990 / SBIR / Phase I
Agency / Branch: DOD / DARPA
Principal Investigator: Su-shing Chen
Award Amount: $49,646.00
Abstract:
An intelligent equipment architecture for cluster and in-situ semiconductor manufacturing processes is proposed. it has two components: (1) manufacturing equipment - equipment hardware and sensors, and (2) intelligent expert workstation - a hybrid ai/neural network expert system. the intelligent… More