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INTELLIGENT CONTROL OF SEMICONDUCTOR MANUFACTURING PROCESSES

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
13141
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
13141
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
3d Informatics
9610 Fairmead Dr Charlotte, NC 28269
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Woman-Owned: No
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: INTELLIGENT CONTROL OF SEMICONDUCTOR MANUFACTURING PROCESSES
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $49,646.00
 

Abstract:

AN INTELLIGENT EQUIPMENT ARCHITECTURE FOR CLUSTER AND IN-SITU SEMICONDUCTOR MANUFACTURING PROCESSES IS PROPOSED. IT HAS TWO COMPONENTS: (1) MANUFACTURING EQUIPMENT - EQUIPMENT HARDWARE AND SENSORS, AND (2) INTELLIGENT EXPERT WORKSTATION - A HYBRID AI/NEURAL NETWORK EXPERT SYSTEM. THE INTELLIGENT CONTROL SCHEME IN THE INTELLIGENT EXPERT SYSTEM HAS THE FOLLOWING FEATURES: (1) EQUIPMENT/PROCESS MODELING BY NEURAL NETWORKS, (2) NEURAL NETWORK HARDWARE EMULATOR AS CONTROLLER, (3) SENSOR-BASED CONTROL, (4) LOCAL SIMULATION BY NEURAL NETWORKS FOR CONTROL DESIGN, (5) HEURISTICS FOR CONTROL DESIGN BY RULE-BASED SUBSYSTEM, (6) LEARNING, MONITORING, AND CONTROL BY THE SAME MODELS, (7) SENSOR DRIFTS AND NOISES MAY BE MONITORED BY NEURAL NETWORKS, (8) TIGHT COUPLING OF MANUFACTURING LINE AND ITS SIMULATOR. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - A UNIQUE CONTROL SCHEME WITH REAL-TIME, ADAPTIVE, AND MODELING CAPABILITIES IS CRUCIAL TO VLSI AND ULSI DEVICES AND ADVANCED ELECTRONIC MATERIAL PROCESSING. THIS INTELLIGENT EQUIPMENT ARCHITECTURE FOR CLUSTER PROCESSING CAN ACHIEVE: (1) PROCESS UNIFORMITY, (2) HIGHER YIELD, (3) INTEGRATION OF PROCESS MEASUREMENT AND CONTROL, (4) PROCESS PROGRAMMABILITY, (5) MIXING TECHNOLOGIES, AND (6) EFFICIENT FABRICATION. KEY WORDS - INTELLIGENT CONTROL, EQUIPMENT/PROCESS MODELS, SENSOR-BASED CONTROL, INTELLIGENT EQUIPMENT ARCHITECTURE, MODEL-BASED CONTROL, CLUSTER PROCESSING, NEURAL NETWORK CONTROLLER, HYBRID AI/NEURAL NETWORK EXPERT SYSTEM.

Principal Investigator:

Su-shing Chen
7045477383

Business Contact:

Small Business Information at Submission:

3d Informatics
9610 Fairmead Dr Charlotte, NC 28269

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No