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THE CONSTRUCTION OF A SOFT X-RAY SOURCE USING TRANSITION RADIATION FOR…

Award Information

Agency:
Department of Energy
Branch:
N/A
Award ID:
2481
Program Year/Program:
1986 / SBIR
Agency Tracking Number:
2481
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Adelphi Technology, Inc.
2003 East Bayshore Rd. Redwood City, CA 94063-4121
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1986
Title: THE CONSTRUCTION OF A SOFT X-RAY SOURCE USING TRANSITION RADIATION FOR LITHOGRAPHY
Agency: DOE
Contract: N/A
Award Amount: $479,000.00
 

Abstract:

THE OBJECTIVE OF THIS PROJECT IS TO DEVELOP TRANSITION RADIATORS WITH HIGH AVERAGE PHOTON FLUX AND TO USE THEM AS X-RAY SOURCES FOR SCIENTIFIC AND TECHNOLOGICAL RESEARCH. IN PARTICULAR, THE COMPANY WILL STUDY THE USE OF THESE SOURCES FOR X-RAY LITHOGRAPHY FOR THE PRO- DUCTION OF INTEGRATED CIRCUITS. USING A NEWLY-DEVEL- OPED HIGH-AVERAGE-CURRENT, 50 MEV ACCELERATOR, THE TOTAL PHOTON FLUX FROM SEVERAL FOIL STACKS WILL BE MEASURED. THE RADIATORS WILL BE TESTED AT FULL BEAM CURRENT FOR MAXIMUM FLUX AND TARGET LIFETIME. SUCH A HIGH-BRIGHTNESS SOURCE COULD BE USED TO PRODUCE IN- TEGRATED CIRCUITS WITH CIRCUIT ELEMENTS OF SUBMICRON GEOMETRIES.

Principal Investigator:

Dr. Melvin A. Piestrup
Prinicipal Investigator
4158510633

Business Contact:

Small Business Information at Submission:

Adelphi Technology Inc.
285 Hamilton Suite 430 Woodside, CA 94062

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No