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A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
17249
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
17249
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Adelphi Technology, Inc.
2003 E Bayshore Rd Redwood City, CA 94063-4121
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1995
Title: A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS
Agency: NSF
Contract: N/A
Award Amount: $299,983.00
 

Abstract:

THE PURPOSE OF THE PROPOSED WORK IS TO DESIGN X-RAY OPTICS FOR THE COLLECTION AND REDISTRIBUTION OF THE ANNULAR X-RAY CONE GENERATED BY TRANSITION RADIATION SUCH THAT A UNIFORM X-RAY SPOT IS DELIVERED AT HIGH POWER DENSITY TO A MASK/WAFER TARGET. THIS WILL INCREASE THE POWER DENSITY FROM THE EXISTING 1 MW/CM(2) TO 5 MW/CM(2) PERMITTING TRANSITION RADIATION TO BE A COMPETITIVE SOURCE FOR X-RAY LITHOGRAPHY. TRANSITION RADIATION IS EMITTED IN CONICAL ANNULUS WHICH HAS A CENTRAL HOLE IN THE RADIATION PATTERN AND MORE THAN HALF OF THE X-RAYS ARE EMITTED AT ANGLES LARGER THAN THE ANGLE OF PEAK INTENSITY. HENCE, EFFICIENT COLLECTION OF THE X-RAYS AND THEIR PROPER COLLIMATION INTO AUNIFORM BEAM AREA ON THE SIZE OF THE MASK AND WAFER TARGET AREAS ARE REQUIRED FOR UNIFORM EXPOSURE OF X-RAY PHOTORESISTIN THE PROCESS OF MICROINTEGRATED CIRCUIT PRODUCTION. UNDER THE PROPOSED PROGRAM WE WILL DEMONSTRATE FEASIBILITY OF USING KUMA-KHOV X-RAY OPTICS TO COLLECT AND COLLIMATE X-RAYS FROM A TRANSITION RADIATION SOURCE OVER A ANGULAR RANGE OF UP TO 30 MRAD AND TO PROVIDE A QUASIPARALLEL BEAM SUITABLE OF X-RAY LITHOGRAPHY. THE DESIRED INTENSITY UNIFORMITY ACROSS THE OUTPUT X-RAY BEAM IS3%. A COMPLETE DESIGN OF A KUMAKHOV LENS BASED ON COMPUTER SIMULATION AND ON EXPERIMENTAL RESULTS WITH SINGLE CAPILLARIES AND POLYCAPILLARIES AND THEIR CORRELATION WITH THEORETICAL PREDICTIONS WILL BE DONE.

Principal Investigator:

Dr Melvin A Piestrup
0

Business Contact:


4153287337
Small Business Information at Submission:

Adelphi Technology Inc.
285 Hamilton Ave Suite 430 Palo Alto, CA 94301

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No