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HIGH CONCENTRATION OZONE PRODUCTION FOR SEMICONDUCTOR MANUFACTURING

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
17248
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
17248
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Adelphi Technology, Inc.
2003 E Bayshore Rd Redwood City, CA 94063-4121
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1995
Title: HIGH CONCENTRATION OZONE PRODUCTION FOR SEMICONDUCTOR MANUFACTURING
Agency: NSF
Contract: N/A
Award Amount: $299,972.00
 

Abstract:

THE OBJECTIVE OF THIS RESEARCH IS TO EXPLORE THE FEASIBILITY OF DEVELOPING COMPACT, HIGH CONCENTRATION, OZONEGENERATION EQUIPMENT FOR THE DEMANDING REQUIREMENTS OF THE SEMICONDUCTOR MANUFACTURING AND MATERIALS PROCESSING INDUSTRY. EMERGING PROCESSING TECHNOLOGIES USING OZONE CHEMISTRY HAVE GIVEN RISE TO THE NEED FOR SUCH EQUIPMENT. CURRENT GENERATORS ARE INADEQUATE FOR THE TASK AND TOO LARGETO BE INSTALLED IN THE CLEAN ROOM ENVIRONMENT NEXT TO A CVD SYSTEM OR OTHER SEMICONDUCTOR TOOL. CURRENT DOUBLE-COOLED GENERATOR DESIGNS ALSO REQUIRE A DIELECTRIC COOLANT AND A DEDICATED RECIRCULATING OIL COOLING SYSTEM TO REMOVE HEAT FROM THE GENERATOR ELECTRODES. THE EXPERIMENTAL PROGRAM IN PHASE I WILL BE DIRECTED TOWARD ESTABLISHING THE FEASIBILITYOF DEVELOPING A COMPACT GENERATOR MODULE AND EXCITATION SOURCE WITH THE REQUIRED PERFORMANCE. PHASE II WILL BE DIRECTED TOWARD THE CONSTRUCTION OF A FULL SCALE PROTO-TYPE. IF SUCCESSFUL, THIS PROGRAM WILL LEAD TO THE DEVELOPMENT OF A CRITICAL MANUFACTURING RESOURCE FOR USE IN THE FABRICATION OF THE NEXT GENERATION OF SEMICONDUCTOR DEVICES.

Principal Investigator:

Dr. David G. Boyers
Principal Investigator
0

Business Contact:

Small Business Information at Submission:

Adelphi Technology Inc.
285 Hamilton Ave Suite 430 Palo Alto, CA 94301

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No