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Synchrotron Mimic for Lithography

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
58550
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
0214819
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Adelphi Technology, Inc.
2003 East Bayshore Rd. Redwood City, CA 94063-4121
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: Synchrotron Mimic for Lithography
Agency: NSF
Contract: N/A
Award Amount: $100,000.00
 

Abstract:

This Small Business Innovation Research (SBIR) Phase I project will develop a compact source for lithography. As a synchrotron equivalent, this proposal presents a single-stepper, XUV or soft-x-ray source, which offers high brightness, high collimation, modest operating vacuum, excellent spectrum and moderate cost. The x-rays are generated inside a compact betatron by the electrons passing through thin radiators made of thin metal foils, crystals or multi-layers producing a forward-directed beam of x-rays whose photon energies can be XUV, soft and hard x-ray depending upon choice of radiator. As a synchrotron mimic, the source can have many applications. For lithography the x-ray wavelength can be optimized for highest photo-resist sensitivity, e.g.1.4 nm. In a proof of principal experiments, tunable monochromatic x-rays from thin crystal and multi-layer radiators mounted inside a betatron have been observed. Pulse-height spectra were obtained and tuned by rocking the crystal or multi-layer relative to the electron-beam direction. We will use our existing experimental apparatus to demonstrate high x-ray flux at soft x-ray wavelengths. Potential commercial applications effort will demonstrate the capability of generating XUV and x-rays for lithography and crystallography. It can also function also as a medical source for imaging and as a laboratory source for scientific purposes now relegated exclusively to synchrotrons.

Principal Investigator:

Melvin Piestrup
6503287337
melpie@adelphitech.com

Business Contact:

Small Business Information at Submission:

Adelphi Technology, Inc
2181 Park Boulevard Palo Alto, CA 94306

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No