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A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
17249
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
17249
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Adelphi Technology, Inc.
2003 East Bayshore Rd. Redwood City, CA 94063-4121
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: A COLLIMATED X-RAY LITHOGRAPHY SOURCE USING A KUMAKHOV LENS
Agency: NSF
Contract: N/A
Award Amount: $49,993.00
 

Abstract:

N/A

Principal Investigator:

Dr Melvin A Piestrup
0

Business Contact:


4153287337
Small Business Information at Submission:

Adelphi Technology Inc.
285 Hamilton Ave Suite 430 Palo Alto, CA 94301

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No