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METALORGANIC MOLECULAR BEAM EPITAXY

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
8263
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
8263
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1990
Title: METALORGANIC MOLECULAR BEAM EPITAXY
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $499,000.00
 

Abstract:

METALORGANIC MOLECULAR BEAM EPITAXY (MOMBE) IS A SEMICONDUCTOR GROWTH TECHNIQUE THAT HAS THE POTENTIAL FOR COMBINING THE BEST FEATURES OF MOLECULAR BEAM EPITAXY WITH THOSE OF ORGANOMETALLIC VAPOR PHASE EPITAXY (OMVPE). A MAJOR PROBLEM HINDERING DEVELOPMENT OF MOMBE TECHNIQUES FOR GROWING GROUP III/V SEMICONDUCTORS IS THE AVAILABILITY OF APPROPRIATELY DESIGNED SOURCE REAGENTS THAT PERMIT EFFICIENT DECOMPOSITION IN THE REACTOR COUPLED WITH VOLATILITY AND PURITY THAT MAXIMIZE THE INHERENT BENEFITS OF THE PROCESS. ADDITIONALLY, LESS TOXIC REAGENTS ARE REQUIRED TO MINIMIZE THE DIFFICULT HANDLING PROBLEMS ASSOCIATED WITH THE USE OF A RESINE IN OMVPE. THE FEASIBILITY IS BEING INVESTIGATED OF DEVELOPING A PROGRAM THAT WILL FACILITATE SCREENING OF A GROUP OF NOVEL SOURCE REAGENT COMPOUNDS THATHOLD HIGH PROMISE FOR MOMBE. SOURCES FOR CARBON-FREE INCORPORATION OF ALUMINUM AND GALLIUM ARE BEING IDENTIFIED, SYNTHESIZED, AND THEN EVALUATED IN A MOMBE REACTOR. PRELIMINARY LOW PRESSURE PYROLYSES OF ARSENIC SOURCE REAGENTS ARE BEING PERFORMED. USING THE EXPERIMENTAL DATA, A THEORY TO ACCOUNT FOR THE KINETICS AND PRODUCT DISTRIBUTION FROM THE LOW PRESSURE PYROLYSIS OF ALKYLARSINES IS BEING DEVELOPED THAT WILL PERMIT THE PREDICTION OF OPTIMUM SOURCE REAGENTS. IN A LATER EFFORT, THE OPTIMUM ELEMENT SOURCE REAGENTS WOULD BE PREPARED AND ALUMINUM GALLIUM ARSENIDE DEVICES PREPARED AND TESTED.

Principal Investigator:

Dr Duncan W Brown
2033552681

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
520-b Danbury Rd New Milford, CT 06776

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No