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BIMETALLIC SOURCE REAGENTS FOR THIN FILM DEPOSITION OF LEAD TITANATE AND PZT

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
18613
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
18613
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
View profile »
Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: BIMETALLIC SOURCE REAGENTS FOR THIN FILM DEPOSITION OF LEAD TITANATE AND PZT
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $50,000.00
 

Abstract:

METALORGANIC CHEMICAL VAPOR DEPOSITION (MOCVD) HAS BECOME A SUCCESSFUL THIN FILM GROWTH TECHNIQUE DUE TO ITS INHERENT CONTROL OVER FILM COMPOSITION, PURITY, UNIFORMITY AND DEPOSITION RATE. THIN FILM TECHNOLOGY FOR FERROELECTRIC MATERIALS SUCH AS LEAD TITANATE AND PZT IS IN GREAT DEMAND DUE TO MANY APPLICATIONS IN PEIZOELECTRIC AND OPTOELECTRIC DEVICES. THE ELECTRONIC PROPERTIES OF THE THIN FILM ARE CRITICALLY SENSITIVE TO THE ELEMENTAL STOICHIOMETRY WITHIN THE FILM, MAKING MOCVD A TECHNIQUE WHICH IS VERY SENSITIVE TO PRECURSOR FLOW RATES, TEMPERATURES AND PRESSURES. MUCH IS TO BE GAINED BY DIRECT FOCUS ON MOLECULAR ENGINEERING OF PRECURSORS IN ODER TO OPTIMIZE THE STOICHIOMETRY OF THE THIN FILM. NEW DIMENSIONS OF PURITY AND PROCESS COMPATIBILITY COULD BE REALIZED USING SOURCES WHICH MAINTAIN A 1:1 RATIO OF LEAD TO GROUP IVB METAL TO CONTROL FILM COMPOSITION AT A MOLECULAR LEVEL. IN PHASE I OF THIS PROJECT HETEROBIMETALLIC LEAD-TITANIUM AND LEAD-ZIRCONIUM PRECURSORS WILL BE SYNTHESIZED, CHARACTERIZED AND EVALUATED FOR USE AS VOLATILE PRECURSORS FOR PZT. PHASE II WILL USE THE NEW PRECURSOR MATERIALS FOR THIN FILM DEPOSITLION STUDIES AND OPTIMIZE THE PHYSICAL PROPERTIES OF THE FILMS. PHASE III WILL BE THE COMMERCIAL INTRODUCTION OF SOURCE REAGENTS AND PROCESS TECHNOLOGY FOR USE IN DEVICE FABRICATION.

Principal Investigator:

Dr. Brian Vaartstra
2037941100

Business Contact:

Small Business Information at Submission:

Advanced Technology
7 Commerce Drive Danbury, CT 06810

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No