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Gas Microcontroller

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
18188
Program Year/Program:
1992 / SBIR
Agency Tracking Number:
18188
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1992
Title: Gas Microcontroller
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $49,321.00
 

Abstract:

Many key steps in semiconductor "chip" manufacture utilize gases to form thin films which are critical to both device performance and cost. Over $2 billion worth of equipment, materials and peripherals are now sold annually to the semiconductor manufacturers who use gas phase processing. As increased memory demands escalate the need for thinner films, higher quality and lower costs, ever more exacting control over the introduction of gases into this equipment is required. Advanced Technology Materials, Inc is constructing mini-controllers for these gases which have response times nearly 1000 times faster than existing controllers, control over extremely low flows, and can be fully electronically controlled and integrated with gas purification and impurity detection modules. These controllers can be manufactured using micromachining techniques and should therefore be highly cost effective while providing exact control during thin film deposition.

Principal Investigator:

Charles P. Beetz, Phd
2037941100

Business Contact:

Small Business Information at Submission:

Advanced Technology
7 Commerce Drive Danbury, CT 06810

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No