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IN-SITU X-RAY DETECTOR

Award Information

Agency:
Department of Defense 		Branch:
Defense Advanced Research Projects Agency 		Award ID:
17748 		Program Year/Program:
1993 / SBIR
Agency Tracking Number:
17748 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1993
Title: IN-SITU X-RAY DETECTOR
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $249,572.00
 

Abstract:

IN-SITU MONITORING OF CRITICAL FILM PROPERTIES WOULD GREATLY ENHANCE PROCESS CONTROL OF THIN FILM COATING TECHNOLOGIES SUCH AS CHEMICAL VAPOR DEPOSITION (CVD) AND PHYSICAL VAPOR DEPOSITION (PVD). ATM, WORKING IN CONJUNCTION WITH PENNSYLVANIA STATE UNIVERSITY, PROPOSES TO INCORPORATE A POSITION SENSITIVE FIBER OPTIC X-RAY SCINTILLATION DETECTOR (PSSD) FOR REAL TIME X-RAY ANALYSIS OF CHEMICALLY VAPOR DEPOSITED METALLIC FILMS. THIS DEVICE, DEVELOPED AT PENN STATE FOR NON-DESTRUCTIVE TESTING, CAN BE USED TO SIMULTANEOUSLY MEASURE SEVERAL CRITICAL FILM PARAMETERS SUCH AS THICKNESS, CRYSTAL STRUCTURE, CRYSTAL PERFECTION, PREFERRED ORIENTATION, AND RESIDUAL STRESS. COMPARED TO TRADITIONAL X-RAY DETECTORS, THE PSSD SYSTEM IS VERY COMPACT, REQUIRES NO SCANNING, AND MOST IMPORTANTLY, HAS VERY RAPID SAMPLING TIME (LESS THAN 1 SECOND). ALL THESE ATTRIBUTES MAKE IT IDEALLY SUITED FOR REAL TIME ANALYSIS OF THIN FILM GROWTH. THE PROPOSED PROGRAM WOULD FIRST DEVELOP A METHOD FOR INCORPORATING THE PSSD DEVICE INTO BOTH BATCH AND CONTINUOUS CVD OPERATIONS DEVELOPED AT ATM FOR DOD APPLICATIONS, AND SECONDLY INVESTIGATE ITS EFFECTIVENESS IN A SERIES OF COATING EXPERIMENTS. COMPLETION OF THIS EFFORT WIL ENABLE A PHASE 11 EFFORT FOR INCORPORATING THE PSSD X-RAY MONITOR INTO CVD AND PVD COATING MANUFACTURING PROCESSES FOR FEEDBACK PROCESS CONTROL. ANTICIPATED BENEFITS/POTENTIAL APPLICATIONS - A REASONABLY PRICED IN-SITU X-RAY MONITORING DEVICE WOULD BE APPLICABLE TO MANY ACTIVE FEED-BACK LOOPS FOR INTELLIGENT CONTROL OF OTHER COATING PROCESSES: MELT-SPRAY, SOLUTION-SPRAY, ELECTROLESS, ELECTROLYTIC, ETC. SUCH A DEVICE COULD ALSO BE USED AS AN IN-LINE NON-DESTRUCTIVE QUALITY CONTROL TOOL.

Principal Investigator:

David Kurtz
2037941100

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No