USA flag logo/image

An Official Website of the United States Government

Chemical Vapor Deposition of Beta-BaB2O4 (BBO) for Integrated Nonlinear Optics

Award Information

Department of Defense
Missile Defense Agency
Award ID:
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
View profile »
Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Phase 1
Fiscal Year: 1995
Title: Chemical Vapor Deposition of Beta-BaB2O4 (BBO) for Integrated Nonlinear Optics
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $60,000.00


The superior optical properties of BBO and its applicability in frequency doublers and waveguides justifies development of thin film deposition processes which can be integrated with microelectronic processing. The high damage threshold of BBO, a necessary component for device integrity, is a major advantage over other nonlinear optic materials. In Phase I, chemical precursors and a deposition process specifically tailored to BBO will produce high quality epitaxial thin films for nonlinear optical waveguides and give direction for commercial device fabrication. In a joint program with Illinois Institute of Technology, SHG measurements will be made to assess the optical performance of the films. In Phase II, thin-film deposition will be optimized to achieve device-quality BBO, concurrent with the fabrication and testing of optical waveguides. The proposed development program will provide the technological basis required for the commercialization of barium borate thin film devices such as waveguides and optical integrated circuits.

Principal Investigator:

Brian Vaartstra

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Dr Danbury, CT 06810

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No