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Chemical Vapor Desposition of PLZT for Low Cost SLM Manufacturing

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Phase 1
Fiscal Year: 1995
Title: Chemical Vapor Desposition of PLZT for Low Cost SLM Manufacturing
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $80,000.00


Spatial light modulators (SLM's) have been identified as critical elements in many optical computing and signal processing applications. Typically these devices use expensive bulk ceramics that result in high cost and difficult device integration. Ceramic materials in the PbLaZrTiO3 (PLZT) family of compounds show a unique combination of high transparency, large electrooptic effects and exceptional speed. Combined with ATM's ability to produce high quality PLZT thin films by MOCVD, we believe that SLM's with frame rates higher than 1MHz can be fabricated at a fraction of the cost of currently available low performance devices. In Phase I we will demonstrate the feasibility of a high deposition rate process for PLZT with electrooptic properties sufficient to enable operation at full contrast at less than 35V. Phase II will focus on integration of MOCVD PLZT with silicon drive electronics, to produce monolithic commercially available spatial light modulator operating at above 1MHz. Additionally ATM will market a "turn-key" process to fabricate thin, high quality PLT films for integrated electro-optics.

Principal Investigator:

Steven Bilodeau

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No