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Stress Analyzer for Microelectronic Devices

Award Information

Department of Defense
Air Force
Award ID:
Program Year/Program:
1996 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Phase 2
Fiscal Year: 1996
Title: Stress Analyzer for Microelectronic Devices
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $750,000.00


Multilayer thin films deposited onto Si wafers often exhibit high residual stresses during processing, leading to structural failure and/or electrical breakdown. Traditional scanning x-ray diffraction provides an accurate measurement of complex stress behavior in multilayer structures, but is difficult to carry out on a routine basis. Laser deflection methods are easy to perform but provide a limited macroscopic indication of only planer stress in a single layer. ATM, in conjunction with Penn State University and Proto Manufacturing, proposes to develop a routine wafer stress mapping instrument that offers comprehensive analysis of x-ray diffraction combined with the simplicity/mapping capability of laser deflection. The proposed system utilizes a compact, non-moving fiber-optic detector, a small (only 200 watt) x-ray source, and single exposure measuring technique. Proposed system is based on a commercially proven XRD stress system for bulk metals stress analysis. Automated mapping and thermal cycling capabilities will be included in the system. Successful completion of Phase 1 program will result in a fully operational stress mapping system to be marketed and manufactured for commercial sale during Phase II.

Principal Investigator:

David Kurtz

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No