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Cost Effective Copper CVD Precursors for ULSI Devices

Award Information

Department of Defense
Defense Advanced Research Projects Agency
Award ID:
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Phase 1
Fiscal Year: 1994
Title: Cost Effective Copper CVD Precursors for ULSI Devices
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $97,626.00


Chemical vapor deposition (CVD) of copper for vias and interconnects is critical to manufacture of next generation high speed ULSI devices and has been extensively investigated over the last few years. Although considerable progress has been made commercialization of this technology is currently impossible due to the high cost of the source reagents. In this Phase I program Advanced Technology Materials, Inc.(ATM) will investigate three novel classes of copper precursors specifically designed for synthesis from inexpensive feedstocks. In Phase II the molecular structure of the compounds will be optimized and large scale synthetic methods will be developed. In addition we will collaborate with a major semiconductor manfacturer to integrate the source reagents and ATM's proprietary liquid delivery technology into a commercial CVD reactor. This will lead in Phase III to introduction of a commercial manufacturing process for CVD copper. Anticipated Benefits: Chemical vapor deposition of copper is on the critical pathway for next generation high speed logic devices. The identification of cost effective Precursors for this process will have a profound and immediate effect on logic device fabrication.

Principal Investigator:

Douglas Gordon

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No