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SiC accelerometers for harsh environments

Award Information

Department of Defense
Award ID:
Program Year/Program:
1996 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
Phase 2
Fiscal Year: 1996
Title: SiC accelerometers for harsh environments
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $750,000.00


Sensors and control electronics based on SiC offer an opportunity to realize systems with operating temperatures approaching 500 degrees C. The unique high temperature properties and chemical robustness of SiC make it an ideal choice for applications where generic components and sensors need to function under widely varying environmental conditions The wide range of environments in which military hardware must function requires sensors which have a high degree of temperture and chemical robustness. We proposed to fabricate SiC accelerometers using surface micromachining techniques which are capable of sustained operation in harsh environments such as active guidance systems for artillery projectiles. SiC has been primarily viewed as a material suited to high temperature electronics and blue light emitting diodes. We believe this to be the first attempt to leverage the intrinsic properties of SiC for stand alone sensing applications. These sensors will also be useful in other applications where corrosion resistance and high temperature performance are critical such as semiconductor processing equipment and automobile engine monitoring.

Principal Investigator:

John Steinbeck

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No