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Point of Use Generation of Silane Gas

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
29893
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
29893
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Technologies/Laboratories Intl
Advanced Technologies/Lab Intl 20010 Century Blvd, Ste 500 Germantown, MD 20874 0111
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Woman-Owned: Yes
Minority-Owned: Yes
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1995
Title: Point of Use Generation of Silane Gas
Agency: NSF
Contract: 9460595
Award Amount: $65,000.00
 

Abstract:

N/A

Principal Investigator:

Peter Kirlin
0

Business Contact:

Small Business Information at Submission:

Advanced Technology Materials
7 Commerce Drive Danbury, CT 06810

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No