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FERROELECTRIC HETEROSTRUCTURES FOR HIGH-DENSITY DRAMS

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
25536
Program Year/Program:
1994 / SBIR
Agency Tracking Number:
25536
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT 06108-3728
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1994
Title: FERROELECTRIC HETEROSTRUCTURES FOR HIGH-DENSITY DRAMS
Agency / Branch: DOD / MDA
Contract: N/A
Award Amount: $59,806.00
 

Abstract:

The innovations of the proposed program are: 1) advancing thin-film deposition technology to achieve fully epitaxial growth of ferroelectric heterostructures on silicon substrates, by using the highly successful pulsed laser deposition (PLD) technique; 2) replacing the Pt bottom electrode with the epitaxial conductive oxide material; 3) achieving a full monolithic integration of high-density ferroelectric/conductive oxide capacitors with Si integrated circuits (ICs). The main thrust of Phase I will be to demonstrate the feasibility of epitaxial growth of a novel ferroelectric heterostructure, on top of an epitaxial YSZ buffered silicon substrate.

Principal Investigator:

Qi Li, Phd
2035289806

Business Contact:

Small Business Information at Submission:

Advanced Fuel Research, Inc.
87 Church 380379 East Hartford, CT 06138

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No