FERROELECTRIC HETEROSTRUCTURES FOR HIGH-DENSITY DRAMS

Award Information

Agency: Department of Defense	Branch: Missile Defense Agency	Award ID: 25536	Program Year/Program: 1994 / SBIR
Agency Tracking Number: 25536	Solicitation Year: N/A	Solicitation Topic Code: N/A	Solicitation Number: N/A

Small Business Information: Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT -
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Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No

Phase 1: Fiscal Year: 1994

Title: FERROELECTRIC HETEROSTRUCTURES FOR HIGH-DENSITY DRAMS

Agency / Branch: DOD / MDA

Contract: N/A

Award Amount: $59,806.00

Abstract:
The innovations of the proposed program are: 1) advancing thin-film deposition technology to achieve fully epitaxial growth of ferroelectric heterostructures on silicon substrates, by using the highly successful pulsed laser deposition (PLD) technique; 2) replacing the Pt bottom electrode with the epitaxial conductive oxide material; 3) achieving a full monolithic integration of high-density ferroelectric/conductive oxide capacitors with Si integrated circuits (ICs). The main thrust of Phase I will be to demonstrate the feasibility of epitaxial growth of a novel ferroelectric heterostructure, on top of an epitaxial YSZ buffered silicon substrate.

Principal Investigator:
Qi Li, Phd
2035289806

Business Contact:

Small Business Information at Submission:

Advanced Fuel Research, Inc.
87 Church 380379 East Hartford, CT 06138

EIN/Tax ID:

DUNS: N/A

Number of Employees:

Woman-Owned: No

Minority-Owned: No

HUBZone-Owned: No