USA flag logo/image

An Official Website of the United States Government

EXITAXIAL FERROELECTRIC/COMDUCTIVE OXIDE THIN-FILM HETEROSTRUCTURES ON SILICON…

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
27336
Program Year/Program:
1996 / SBIR
Agency Tracking Number:
27336
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT 06108-3728
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1996
Title: EXITAXIAL FERROELECTRIC/COMDUCTIVE OXIDE THIN-FILM HETEROSTRUCTURES ON SILICON FOR MICROELECTRONICS APPLICATIONS
Agency: NSF
Contract: N/A
Award Amount: $299,171.00
 

Abstract:

IMPORTANT TECHNOLOGIC OBSTACLES MUST BE REMOVED BEFORE SEMICONDUCTOR DEVICES MONOLITHICALLY INTEGRATED WITH OXIDE FERROELECTRICS CAN BECOME A PRACTICAL REALITY. THE INNOVATIONS OF THE PROGRAM ARE; (1) ADVANCING THIN-FILM DEPOSITION TECHNOLOGY TO ACHIEVE FULLY EPITAXIAL GROWTH OF FERROELECTRIC FILMS ON SILICON SUBSTRATES, BY USING THE HIGHLY SUCCESSFUL PULSED LASER DEPOSITION (PLD) TECHNIQUE; (2) REPLACING THE PT BOTTOM ELECTRODE WITH AN EPITAXIAL CONDUCTIVE OXIDE MATERIAL; AND (3) ACHIEVING A FULL MONOLITHIC INTEGRATION OF HIGH-DENSITY FERROELECTRIC/CONDUCTIVE OXIDE CAPACITORS WITH SI INTEGRATED CIRCUITS. THE MAIN THRUST IS TO DEMONSTRATE THE FEASIBILITY OF EPITAXIAL GROWTH OF A FERROELECTRIC FILM ON TOP OF A CONDUCTIVE OXIDE FILM, ON TOP OF AN EPITAXIAL YSZ BUFFERED SILICON SUBSTRATE. THE RESULTING HETEROSTRUCTURES ARE BEING USED TO FABRICATE A SIMPLE FERROELECTRIC SWITCHED CAPACITOR. THIS DEVICE WILL BE FULLY CHARACTERIZED AND WILL BECOME THE BASIC BUILDING BLOCK FOR APPLICATIONS OF FERROELECTRIC THIN FILMS TO THE MICROELECTRONICS INDUSTRY.

Principal Investigator:

Qi Li
2035289806

Business Contact:

Small Business Information at Submission:

Advanced Fuel Research Inc.
87 Church St Po Box 380379 East Hartford, CT 06138

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No