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In-Line Process Monitoring and Control for Poly-Silicon Formation Inside…

Award Information

Agency:
National Science Foundation 		Branch:
N/A 		Award ID:
29874 		Program Year/Program:
1995 / SBIR
Agency Tracking Number:
29874 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1995
Title: In-Line Process Monitoring and Control for Poly-Silicon Formation Inside Cluster Tools
Agency: NSF
Contract: 9460472
Award Amount: $64,970.00
 

Abstract:

N/A

Principal Investigator:

Peter Rosenthal
0

Business Contact:

Small Business Information at Submission:

Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT 06108

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No