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PROCESS MONITORING AND CONTROL DURING PLASMA PROCESSING OF SEMICONDUCTORS

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
14844
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
14844
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Advanced Fuel Research, Inc.
87 Church Street East Hartford, CT 06108-3728
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: PROCESS MONITORING AND CONTROL DURING PLASMA PROCESSING OF SEMICONDUCTORS
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $56,668.00
 

Abstract:

N/A

Principal Investigator:

Philip W Morrison Jr
Principal Investigator
2035289806

Business Contact:

Small Business Information at Submission:

Advanced Fuel Research Inc.
Po Box 380343 East Hartford, CT 06138

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No