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Low-cost device relevant Indium Gallium Nitride (InGaN) or Alternatives

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
91831
Program Year/Program:
2009 / SBIR
Agency Tracking Number:
08SB2-0806
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
4WAVE, INC.
22660 Execute Drive Suite 101 Sterling, VA 20166-
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2009
Title: Low-cost device relevant Indium Gallium Nitride (InGaN) or Alternatives
Agency / Branch: DOD / DARPA
Contract: W31P4Q-09-C-0215
Award Amount: $97,579.00
 

Abstract:

The project aims to grow device-quality InxGa1-xN, an important semiconductor because the band gap can be shifted widely by varying x, using a new form of plasma sputtering, Biased-Target Deposition (BTD). The major objectives are to grow x > 0.05 material on sapphire at 600-800oC (standard) and 300-500oC (beneficially reduced) temperatures, and to characterize material quality via X-ray diffraction and photoluminescence seeking defined criteria. BTD uses a separate plasma source to provide ions for sputtering, so low bias voltages on the targets produce unprecedented (for sputtering) low and controllable kinetic energies of arriving In, Ga and N atoms at the growing InGaN surface. The hypothesis will be tested that slightly elevated particle energies might replace the atom mobility effects of heating and allow growth at lower temperature, which would solve a well-known phase segregation problem in InxGa1-xN as x is increased. Techniques within BTD give an aggressive nitriding environment, starting from inert N2, so InGaN is grown by co-sputtering from separate In and Ga metal sputter targets, the Ga target being a molten pool.

Principal Investigator:

David Baldwin
VP of R&D
7037879283
dbaldwin@4waveinc.com

Business Contact:

Sami Antrazi
President
7037879283
santrazi@4waveinc.com
Small Business Information at Submission:

4WAVE, INC.
22660 Execute Drive Suite 101 Sterling, VA 20166

EIN/Tax ID: 542000866
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No