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Microfabricated Silicon Carbide Heat Flux Sensor

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
26054
Program Year/Program:
1995 / SBIR
Agency Tracking Number:
26054
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
ADVANCED MICROMACHINES, INC.
11000 CEDAR AVENUE Cleveland, OH 44106
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1995
Title: Microfabricated Silicon Carbide Heat Flux Sensor
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $750,000.00
 

Abstract:

The goal of this project is to develop new high-temperature heat flux sensors for heat transfer measurements in turbomachinery. The following obejctives will be pursued. Pototype sensors will be demonstrated which function at temperatures as high as 600C with a frequency response up to 50kHz. Using microfabrication techniques, miniature sensors will be produced for better than 0.1 mm spatial resolution. Batch fabrication techniques allow large arrays to be be produce inexpensively to measrue heat transfer over several square centimeters. Development of prototype divices and preliminary testing will be conducted by Advanced MicroMachines Incorporated. These sensors will exploit the high-temperature capabilities of siliocon carbide, using silicon carbide fabrication facilities available to AMMI. Successful development will result in a sensor technology that provides new capabilities for both commerical and military turbomachinery applications. This technology will allow both commerical and military manfacturers to develop more efficient and better performing engines and turbines.

Principal Investigator:

Ken Goldman
2168319559

Business Contact:

Small Business Information at Submission:

Advanced Micromachines, Inc.
31100 South Woodland Road Pepper Pike, OH 44124

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No