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X-RAY INSTRUMENTATION FOR IMPROVED SEMICONDUCTOR MANUFACTURING PRODUCTIVITY

Award Information

Agency:
National Science Foundation 		Branch:
N/A 		Award ID:
7453 		Program Year/Program:
1989 / SBIR
Agency Tracking Number:
7453 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Aracor
425 Lakeside Drive Sunnyvale, CA 94086 0470
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1989
Title: X-RAY INSTRUMENTATION FOR IMPROVED SEMICONDUCTOR MANUFACTURING PRODUCTIVITY
Agency: NSF
Contract: N/A
Award Amount: $224,999.00
 

Abstract:

RESEARCH ON UNIQUE SOFT X-RAY WAVE-LENGTH DISPERSIVE INSTRUMENTATION IS PROPOSED TO FULFILL IMPORTANT PROCESS MONITOR NEEDS IN THE SEMICONDUCTOR INDUSTRY. ARACOR EXPERIENCE IN DESIGNING AND SUCCESSFULLY APPLYING MULTILAYER SYNTHETIC MICROSTRUCTURES TO OBTAIN BOTH WAVE-LENGTH DISCRIMINATION AND FOCUSING OF SOFT X-RAYS IS UTILIZED AS A KEY PART OF THIS WORK. THIS PROPOSAL DETAILS HOW THE NOVEL X-RAY OPTIC ELEMENTS PROVIDE LARGE SOLID-ANGLE COLLECTION EFFICIENCY AND FOCUSING OF FLUORESCENT SOFT X-RAYS TO YIELD QUANTITATIVE, NON-DESTRUCTIVE MEASUREMENT OF ELEMENTAL MATERIALS WITHIN MEASUREMENT TIMES OF ONE TO TWO SECONDS INSTEAD OF MINUTES AS FOR X-RAY ENERGY-DISPERSIVE INSTRUMENTS. THE RAPIDITY OF MEASUREMENT ALLOWS APPLICATION AS A PROCESS LINE MONITOR WITH THE CAPABILITY OF UNAMBIGUOUSLY DETERMINING THE ELEMENTAL CONCENTRATIONS ACROSS THE WAFER SURFACE. A UNIQUE AND EXTREMELY SIGNIFICANT APPLICATION WHICH COMES DIRECTLY FROM HIGH FLUX COUNTING IS THE ABILITY TO DETERMINETHE PROJECTED RANGE OF ION IMPLANTED SPECIES. THE PROPOSED RESEARCH IN PHASE I IS PRIMARILY THEORETICAL, WITH MAJOR EMPHASIS ON DETERMINING THE PARAMETERS CHARACTERIZING THE MULTILAYER SYNTHETIC MICROSTRUCTURES. THE FINAL RESULT TO BE OBTAINED IN PHASE I IS THE DESIGN OF A CHARACTERIZED PROTOTYPE INSTRUMENT.

Principal Investigator:

Louis Koppel
0

Business Contact:

Small Business Information at Submission:

Advanced Research & Applctns
425 Lakeside Drive Sunnyvale, CA 94086

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No