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X-RAY MICROLITHOGRAPHY COLLIMATOR DEVELOPMENT

Award Information

Agency:
Department of Defense 		Branch:
Defense Advanced Research Projects Agency 		Award ID:
15149 		Program Year/Program:
1993 / SBIR
Agency Tracking Number:
15149 		Solicitation Year:
N/A 		Solicitation Topic Code:
N/A 		Solicitation Number:
N/A
Small Business Information
Aracor
425 Lakeside Drive Sunnyvale, CA 94086 0470
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1993
Title: X-RAY MICROLITHOGRAPHY COLLIMATOR DEVELOPMENT
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $295,898.00
 

Abstract:

DARPA AND THE U.S. SEMICONDUCTOR COMMUNITY ARE ACTIVELY DEVELOPING LASER-PRODUCED PLASMA (LPP) X-RAY SOURCES AS THE BASIS FOR X-RAY MICROLITHOGRAPHY EXPOSURE SYSTEMS. THESE LPP SOURCES WILL ALLOW THE CONSTRUCTION OF COMPACT EXPOSURE SYSTEMS THAT CAN BE EASILY INTEGRATED INTO EXISTING SEMICONDUCTOR FABRICATION LINES, AT A COSTSUBSTANTIALLY LESS THAN THAT OF COMPARABLE SYNCHROTRON EXPOSURE BEAM-LINES. IT IS GENERALLY AGREED THAT AN LPP-BASED EXPOSURE SYSTEM MUST INCORPORATE A PARABOLOIDAL SOFT X-RAY COLLIMATOR OPTIC TO COMPENSATE FOR BEAM DIVERGENCE THAT WOULD OTHERWISE DEGRADE THE ABILITY OF THE SYSTEM TO REPLICATE SUB-MICRON LINE FEATURES. THE GOAL OF THE PROPOSED PHASE I PROJECT IS TO CALCULATIONALLY AND EXPERIMENTALLY EVALUATE THE FEASIBILITY OF COLLIMATOR MANUFACTURING INNOVATIONS THAT IMPROVE THE RADIATION TRANSPORT EFFICIENCY AND REDUCE THE REPLICATION COST OF THE COMPONENTS. THIS WILL SET THE STAGE FOR THE CONSTRUCTION AND EVALUATION OF OPTIMZED LPP X-RAY COLLIMATOR PROTOTYPE UNITS IN PHASE II OF THE PROJECT. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - A SUCCESSFUL PROJECT WILL PROVIDE TO THE U.S. SEMICONDUCTOR INDUSTRY A PRACTICAL, EFFICIENT, AND COST-EFFECTIVE MEANS FOR IMPLEMENTING NEXT-GENERATION X-RAY CONTACT MICROLITHOGRAPHY EXPOSURE TECHNIQUES. IT WILL ADDITIONALLY SET IN PLACE AN ADVANCED X-RAY OPTICS TECHNOLOGY THAT SUPPORTS FOLLOWING-GENERATION PROJECTION MICROLITHOGRAPHY TECHNIQUES. KEYWORDS - X-RAY CONTACT MICROLITHOGRAPHY, SOFT X-RAY COLLIMATOR OPTIC

Principal Investigator:

Edward Franco
Principal Investigator
4087337780

Business Contact:

Small Business Information at Submission:

Advanced Research And Applicat
425 Lakeside Drive Sunnyvale, CA 94086

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No