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MICROELECTRONICS CLUSTER TOOL SENSOR DEVELOPMENT

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
15148
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
15148
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aracor
425 Lakeside Drive Sunnyvale, CA 94086 0470
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: MICROELECTRONICS CLUSTER TOOL SENSOR DEVELOPMENT
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $73,533.00
 

Abstract:

THE U.S. SEMICONDUCTOR DEVICE FABRICATION INDUSTRY, WITH THE SUPPORT OF THE DEPARTMENT OF DEFENSE, IS RAPIDLY DEVELOPING THE CLUSTER TOOL CONCEPT AS THE BASIS FOR ADVANCED DEVICE MANUFACTURING. THIS CONCEPT PROVIDES THE CLEAN VACUUM PROCESSING ENVIRONMENT NECESSARY FOR HIGH-YIELD PRODUCTION OF SUBMICRON-SCALE INTEGRATED CIRCUITS, AND PROMOTES ENHANCED PROCESS FLEXIBILITY AND IMPROVED FABRICATION-LINE RELIABILITY. FOR DYNAMIC PROCESSES SUCH AS CHEMICAL VAPOR DEPOSITION (CVD), REAL-TIME PROCESS-CONTROL MONITORING OF AS-BUILT THIN-FILM PROPERTIES IS VITAL. THE PROPOSED PHASE I EFFORT WILL EVALUATE THE ABILITY OF AN INNOVATIVE SOFT X-RAY GAUGING TECHNOLOGY TO PROVIDE IN-SITU THIN-FILM THICKNESS MONITORING, AND OF ADVANCED DIFFRACTION TOPOGRAPHY TECHNIQUES TO MONITOR THIN-FILM SHEET RESISTIVITIES ON A NON-INTRUSIVE BASIS. THIS EFFORT WILL SET THE STAGE FOR INCORPORATION OF THE THIN-FILM GAUGING AND TOPGRAPHY MEASUREMENTS INTO AN INTEGRATED CLUSTER-TOOL SENSOR PACKAGE IN PHASE II OF THE PROJECT. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - A SUCCESSFUL PROJECT WILL PRODUCE IN-SITU PROCESS-CONTROL SENSORS THAT CONTRIBUTE TO THE DEVELOPMENT AND APPLICATION OF CLUSTER TOOL FABRICATION SYSTEMS WITHIN THE U.S. SEMICONDUCTOR DEVICE FABRICATION INDUSTRY.

Principal Investigator:

Louis Koppel
Principal Investigator
4087337780

Business Contact:

Small Business Information at Submission:

Advanced Research And Applicat
425 Lakeside Drive Sunnyvale, CA 94086

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No