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Protective coating for microelectromechanical systems (MEMS)

Award Information

Agency:
Department of Defense
Branch:
Missile Defense Agency
Award ID:
58972
Program Year/Program:
2002 / SBIR
Agency Tracking Number:
02-0556
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
AST PRODUCTS, INC.
AST PRODUCTS, INC. 9 LINNELL CIR BILLERICA, MA 01821
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2002
Title: Protective coating for microelectromechanical systems (MEMS)
Agency / Branch: DOD / MDA
Contract: DASG60-02-P-0145
Award Amount: $68,673.00
 

Abstract:

"Microelectromechanical systems (MEMS) devices, though built using semiconductor equipment, have a different set of failure mechanisms and reliability concerns than integrated circuits. One major concern is stiction, a term that describes the propensity oftwo silicon surfaces to stick to each other if they touch.To solve this problem, AST is proposing to develop organic coatings with Teflon-like characteristics and a high degree of conformality. The proposed film will be around 200 ¿ thick, uniform over a 12 inch diameter circle, and pinhole free. AST will usedifferent technologies such as Chemical Vapor Deposition (CVD) and Plasma Enhanced Chemical Vapor Deposition (PECVD) to develop robust and durable coating processes for MEMS devices. One method that will be used is the deposition of parylene by the CVDtechnique, with simultaneous fluorination of the deposited film. Another deposition method will be PECVD. The precursor materials for this process will be fluorinated gases such as tetra-fluoro-ethylene or other gases that contain fluorine. Differentfluorinated gases will be tested during the Phase I program in order to optimize thin film characteristics. AST has experience with both methods of deposition, which are used in our commercial products. A thin, uniform, and pinhole free film with Teflon-like properties will very useful for the MEMS industry, and any other industry or government agencies that need a conformal, hyd

Principal Investigator:

Mario Cazeca
Manager, R & D
9786637652
mcazeca@astp.com

Business Contact:

Dianne Cazeca
Program Administrator
9786637652
dcazeca@astp.com
Small Business Information at Submission:

Ast Products, Inc.
9 Linnell Circle Billerica, MA 01821

EIN/Tax ID: 043053345
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No