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LASER-INDUCED SURFACE CHEMICAL EPITAXY: A NOVEL THIN FILM DEPOSITION TECHNIQUE

Award Information

Agency:
Department of Defense
Branch:
Air Force
Award ID:
3622
Program Year/Program:
1987 / SBIR
Agency Tracking Number:
3622
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research, Inc.
45 Manning Road Billerica, MA 01821-
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1987
Title: LASER-INDUCED SURFACE CHEMICAL EPITAXY: A NOVEL THIN FILM DEPOSITION TECHNIQUE
Agency / Branch: DOD / USAF
Contract: N/A
Award Amount: $177,000.00
 

Abstract:

THIS PROPOSAL IDENTIFIED A NEW TYPE OF LASER-INDUCED EPITAXIAL GROWTH PROCESS TERMED LASER-INDUCED SURFACE CHEMICAL EPITAXY (LSCE), AND ADDRESSES KEY ISSUED RELATING TO THE FEASIBILITY OF THE TECHNIQUES. THE POTENTIAL ADVANTAGES OF LSCE INCLUDE LAYER-BY-LAYER CONTROL OVER STOICHIOMETRY, ABRUPT INTERFACES, AND LOW GROWTH TEMPERATURES. ADDITIONALLY, LSCE MAY BE USED TO DEPOSIT A WIDE VARIETY OF MATERIALS INCLUDING METALS, METAL OXIDES, SULFIDES, AND PHOSPHIDES, AND II-VI AND III-V COMPOUNDS. THESE ADVANTAGES MAKE THE LSCE TECHNIQUE PARTICULARY WELL SUITED TO THE DEPOSITION OF QUANTUM WELL AND SUPERLATTICE MATERIALS AND DEVICE STRUCTURES WHICH WILL PLAY AN INCREASINGLY IMPORTANT ROLE IN MICROELECTRONICS AND ELECTROOPTICS TECHNOLOGY.

Principal Investigator:

Dr Charter Stinespring
6176639500

Business Contact:

Small Business Information at Submission:

Aerodyne Research Inc.
45 Manning Rd Billerica, MA 01821

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No