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ATOMIC CHLORINE SOURCE FOR SEMICONDUCTOR ETCHING STUDIES

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
5198
Program Year/Program:
1989 / SBIR
Agency Tracking Number:
5198
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research, Inc.
45 MANNING RD BILLERICA, MA -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 2
Fiscal Year: 1989
Title: ATOMIC CHLORINE SOURCE FOR SEMICONDUCTOR ETCHING STUDIES
Agency: NSF
Contract: N/A
Award Amount: $228,829.00
 

Abstract:

CLEAN SOURCES OF ATOMIC CHLORINE ARE REQUIRED FOR MECHANISTIC STUDIES OF SEMICONDUCTOR ETCHING PROCESSES. IN THIS PROPOSAL, AERODYNE RESEARCH, INC. DESCRIBES MODIFICATIONS TO AN EXISTING ULTRAHIGH VACUUM COMPATIBLE, EFFUSIVE BEAM, MICROWAVE DISCHARGE FLUORINE ATOM SOURCE WHICH WOULD ALLOW ITS USE AS A SOURCE OF CHLORINE ATOMS, AND THEY DEFINE MEASUREMENTS TO CHARACTERIZE AND DEMONSTRATE ITS OPERATION. THE MODIFICATIONS ARE AIMED PRIMARILY AT REDUCING HETEROGENEOUS RECOMBINATION OF CHLORINE ATOMS ON THE SOURCE WALLS. THE MEASUREMENT TECHNIQUES INCLUDE MODULATED BEAM MASS SPECTROMETRY AND X-RAY PHOTOELECTRON SPECTROSCOPY.

Principal Investigator:


0

Business Contact:

Dr. stinespring
RESEARCHH SCIENTIST
Small Business Information at Submission:

Aerodyne Research Inc.
45 Manning Rd Billerica, MA 01821

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No