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PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS

Award Information

Agency:
Department of Defense
Branch:
Army
Award ID:
12183
Program Year/Program:
1990 / SBIR
Agency Tracking Number:
12183
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research, Inc.
45 Manning Road Billerica, MA 01821-
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1990
Title: PATTERNED ETCHING OF INFRARED DETECTOR ARRAYS
Agency / Branch: DOD / ARMY
Contract: N/A
Award Amount: $59,890.00
 

Abstract:

WE PROPOSE TO DEVELOP A PATTERNED ETCHING TECHNIQUE FOR INFRARED DETECTOR ARRAYS BASED ON PHOTO-INDUCED ETCHING OF HGCDTE THAT IS COMPATIBLE WITH THE ULTRA-HIGH VACUUM ENVIRONMENT OF A MOLECULAR BEAM EPITAXY APPARATUSES. THE PHASE I RESEARCH FOCUSES ON ESTABLISHING THE EFFICACY OF SUITABLE GAS PHASE PRECURSORS FOR THE ETCHING PROCESS. IF THE PHASE I RESEARCH IS SUCCESSFUL, OPTICAL PROJECTION TECHNIQUES WILL BE USED TO PRODUCE ARRAY STRUCTURES. SIMILAR TECHNIQUES MAY BE SUITABLE FOR MAKING OHMIC CONTACTS TO THE MESAS FORMED BY THE ETCHING STEP.

Principal Investigator:

Andrew Freedman
5086639500

Business Contact:

Small Business Information at Submission:

Aerodyne Research Inc
45 Manning Rd Billercia, MA 01821

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No