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LASER BASED METHYL RADICAL MONITORING FOR PROCESS CONTROL IN DIAMOND CVD…

Award Information

Agency:
Department of Defense
Branch:
Defense Advanced Research Projects Agency
Award ID:
15153
Program Year/Program:
1991 / SBIR
Agency Tracking Number:
15153
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research, Inc.
45 Manning Road Billerica, MA 01821-3976
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1991
Title: LASER BASED METHYL RADICAL MONITORING FOR PROCESS CONTROL IN DIAMOND CVD DEPOSITION
Agency / Branch: DOD / DARPA
Contract: N/A
Award Amount: $60,000.00
 

Abstract:

THE METHYL RADICAL IS A KEY SPECIES IN THE FORMATION OF CVD DIAMOND, FOR WHICH THERE IS A NEED FOR AN ON-LINE MONITOR USABLE IN INDUSTRIAL PRODUCTION OF CVD DIAMOND. WE PROPOSE TO MONITORMETHYL RADICAL CONCENTRATIONS USING THE ABSORPTION OF THE INFRARED OUTPUT OF A NEUTRAL XENON LASER AT 3217.75 WAVENUMBERS. THE PHASE I EXPERIMENTS WILL MEASURE THIS ABSORPTION IN AN RF METHANE PLASMA, IN WHICH METHYL RADICAL CONCENTRATION IS MEASURED USING A PREVIOUSLY CALIBRATED ABSORPTION LINE NEAR 608 WAVENUMBERS. ANTICIPATED BENEFITS/POTENTIAL COMMERCIAL APPLICATIONS - THE PROPOSED METHYL RADICAL MONITOR WOULD BE USED FOR ON-LINE QUALITY CONTROL OF THE DIAMOND DEPOSITION PROCESS. USING OTHER LASER LINES, A SIMILAR MONITOR COULD BE USED FOR OTHER MOLECULAR SPECIES.

Principal Investigator:

Paul Kebabian
Principal Investigator
5086639500

Business Contact:

Small Business Information at Submission:

Aerodyne Research Inc
45 Manning Road Billerica, MA 01821

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No