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ATOMIC CHLORINE SOURCE FOR SEMICONDUCTOR ETCHING STUDIES

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
5198
Program Year/Program:
1987 / SBIR
Agency Tracking Number:
5198
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
Aerodyne Research, Inc.
45 MANNING RD BILLERICA, MA -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 1987
Title: ATOMIC CHLORINE SOURCE FOR SEMICONDUCTOR ETCHING STUDIES
Agency: NSF
Contract: N/A
Award Amount: $40,000.00
 

Abstract:

N/A

Principal Investigator:


0

Business Contact:

Dr. stinespring
RESEARCHH SCIENTIST
Small Business Information at Submission:

Aerodyne Research Inc.
45 Manning Rd Billerica, MA 01821

EIN/Tax ID:
DUNS: N/A
Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No