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Micro-Scale Quadrupole Mass Spectrometer

Award Information

Department of Commerce
National Institute of Standards and Technology
Award ID:
Program Year/Program:
2003 / SBIR
Agency Tracking Number:
Solicitation Year:
Solicitation Topic Code:
Solicitation Number:
Small Business Information
Aerophysics, Inc.
2521 7 Mile Point Road Allouez, MI -
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Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
Phase 1
Fiscal Year: 2003
Title: Micro-Scale Quadrupole Mass Spectrometer
Agency / Branch: DOC / NIST
Contract: N/A
Award Amount: $75,000.00


The proposed research comprises design, analysis, and ultimate fabrication and operation of a microfabricated array of quadrupole mass spectrometers (QMS). The design capitalizes on recent advances in micro-electro-mechanical systems (MEMS) and molecular-beam-epitaxy (MBE) technology so that the device can be mass-produced on a chip. In addition to analyzing a single element QMS in Phase 1, investigators will pursue architectures for multiplexing this geometry to a micromachined array of QMS on a single chip (mAQMS). The analyses of feasibility and expected performance of mAQMS will be guided by the proposing team's demonstrated success in developing similar micro-machined quadrupole ion traps. By implementing the quadrupole element in a massively parallel array, it may be possible to either individually tune filter elements to dedicated mass species allowing real-time sampling and circumventing the need for timely scans, or increase the detection efficiency of the micro-array by simultaneously sampling a given mass with a large number of individual detectors and filters.

Principal Investigator:

Satwik H. Deshmukh

Business Contact:

Small Business Information at Submission:

Aerophysics, Inc.
30981 Woodbrush Road Calument, MI 49913

Number of Employees: N/A
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No