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Micro-Scale Quadrupole Mass Spectrometer
- Small Business Information
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Woman-Owned: NoMinority-Owned: NoHUBZone-Owned: No
- Phase 1
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Fiscal Year: 2003Title: Micro-Scale Quadrupole Mass SpectrometerAgency / Branch: DOC / NISTContract: N/AAward Amount: $75,000.00
Abstract:
The proposed research comprises design, analysis, and ultimate fabrication and operation of a microfabricated array of quadrupole mass spectrometers (QMS). The design capitalizes on recent advances in micro-electro-mechanical systems (MEMS) and molecular-beam-epitaxy (MBE) technology so that the device can be mass-produced on a chip. In addition to analyzing a single element QMS in Phase 1, investigators will pursue architectures for multiplexing this geometry to a micromachined array of QMS on a single chip (mAQMS). The analyses of feasibility and expected performance of mAQMS will be guided by the proposing team's demonstrated success in developing similar micro-machined quadrupole ion traps. By implementing the quadrupole element in a massively parallel array, it may be possible to either individually tune filter elements to dedicated mass species allowing real-time sampling and circumventing the need for timely scans, or increase the detection efficiency of the micro-array by simultaneously sampling a given mass with a large number of individual detectors and filters.Small Business Information at Submission:Principal Investigator:
Satwik H. DeshmukhBusiness Contact:
Aerophysics, Inc.
30981 Woodbrush Road Calument, MI 49913EIN/Tax ID:DUNS: N/ANumber of Employees: N/AWoman-Owned: NoMinority-Owned: NoHUBZone-Owned: No
Award Information
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Agency: Department of Commerce |
Branch: National Institute of Standards and Technology |
Award ID: 62081 |
Program Year/Program: 2003 / SBIR |
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Agency Tracking Number: 307-26 |
Solicitation Year: N/A |
Solicitation Topic Code: N/A |
Solicitation Number: N/A |