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SBIR Phase I: High-Speed, Low-Cost Maskless Lithography

Award Information

Agency:
National Science Foundation
Branch:
N/A
Award ID:
74827
Program Year/Program:
2005 / SBIR
Agency Tracking Number:
0512972
Solicitation Year:
N/A
Solicitation Topic Code:
N/A
Solicitation Number:
N/A
Small Business Information
ALCES Technology, Inc.
650 West Elk Avenue #8 PO Box 11180 Jackson, WY -
View profile »
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No
 
Phase 1
Fiscal Year: 2005
Title: SBIR Phase I: High-Speed, Low-Cost Maskless Lithography
Agency: NSF
Contract: 0512972
Award Amount: $99,827.00
 

Abstract:

This Small Business Innovation Research Phase I research project will investigate the feasibility of using a high-speed linear array of micro grating light modulators (GLM) for cost-effective maskless lithography. Current maskless lithography tools are low-throughput instruments designed for the highest resolution markets (50-200 nm). ALCES proposes a maskless, high-throughput, lithography tool for the 0.5 - 1 um resolution range. The proposed tool will use a 4096-pixel linear array of grating light modulators as a software-reconfigurable and reusable lithographic mask; this is the largest and fastest light modulator available. A linear array of light, modulated by the GLM, would be focused and reduced by optics to ~0.5um resolution and directed to the wafer. The expected throughput will be over 100 times faster than current maskless lithography tools and comparable to mask-based stepper aligners. If successful the proposed tool, with the appropriate light source and optics, has applications outside of the semiconductor industry, in areas such as cell isolation, DNA synthesis, rapid prototyping, and printed circuit board production. The proposed innovation would also have an impact in education and research in academic institutions and government facilities. Maskless lithography would be an affordable technique to quickly fabricate new devices and provide hands-on education in university labs. Ultimately, devices and techniques developed in the academic research community enhance and stimulate innovations in manufacturing.

Principal Investigator:

Richard Yeh
Mr
3077321909
yeh@alcestech.com

Business Contact:

Mark C. Peterman
Mr
3077321994
peterman@alcestech.com
Small Business Information at Submission:

ALCES
4750 Cortland Drive Jackson, WY 83002

EIN/Tax ID:
DUNS: N/A
Number of Employees:
Woman-Owned: No
Minority-Owned: No
HUBZone-Owned: No