Presently available mass spectrometer-based vacuum instruments are not suitable for use in anticipated fusion facilities, where tritium will be used. the ion source is the primary limitation. this r&d program will lead to development of a miniature ecr (electron cyclotron resonant)microwave ion… More

The unique properties of diamond make it attractive as a material for use in high frequency, high power, millimeter microwave tubes and transmission lines. recent advances in gyrotrons and free electron lasers (fels) as power sources, and excellent physics results from the t-10 tokamak in the… More

This program will examine the potential technical and economic benefits of surface treatment of orthopedic devices using plasma source ion implantation, or psii, a new and innovative approach to ion implantation. the program will assess the technical and economic benefits associated with the… More

The goal of this program is to investigate the causes of semiconductor wafer damage during oxygen photoresist stripping with a downstream microwave plasma. the use of oxygen plasmas for dry stripping of photoresist eliminates the handling, disposal, and resist degradation problems associated with… More

We propose to develop an anti-reflection (ar) coating for diamond films optimized to enhance the transmission in the 8 to 12 micron region of the spectrum. the metal-oxide materials to be evaluated have good optical transmission in this spectral region and refractive indices near the optimum value… More

Microwave plasma enhanced chemical vapor deposition (pecvd) of diamond films using halogen based chemistries is proposed in order to develop a low temperature diamond deposition process. the unique properties of diamond, an insulator with the highest room temperature thermal conductivity, make it an… More

The aim of this project is to evaluate the use of fourier transform infrared (ftir) emission spectroscopy for characterizing the diamond thin film deposition process with in situ measurements. an ftir spectrometer will be installed on a commercially-available diamond reactor to record the infrared… More

This project would develop an ecr sputter source for metal oxide thin film deposition employing solid metal oxide targets as a material source. in phase i, ybco will be usedas the specific metal oxide in order to evaluate and eliminate the effects of film damage by energetic particle bombardment… More

Because of the unique properties of diamond, recently developed chemical vapor deposited (cvd) diamond thin films could be used in a wide variety of applications from electronics to cutting tools, infrared optics to abrasives. high quality diamond films are presently grown at rates of about 1… More

The deposition of a thermally conductive, insulating film of diamond onto high power electronic devices is important for packaging applications for corrosive environments, or high power applications where coolants are used for thermal management. Deposition of diamond will require a basic… More

Silicon carbide is a leading new candidate for mirror blanks because of its high stiffness, relatively high thermal conductivity, and abrasion resistance. the base material contains pores or large grains, which make it difficult to provide a smooth front surface. researchers have developed a process… More

Electron Cyclotron Resonance (ECR) plasma technology is widely used in the etching of III-V semiconductor devices. This has enabledthe fabrication of a wide variety of high speed analog, digital, and optoelectronic devices. As the need grows for high performance devices with dimensions below 0.1… More

Exposure of blood to an artificial surface usually leads to the activation of the intrinsic pathway of the plasma coagulation cascade and to the activation of platelets, which are often accompanied by the formation of a thrombus, or blood clot. a popular technique for imparting thromboresistance to… More

40 High Growth Rate Cubic Boron Nitride Deposition--Applied Science and Technology, Inc., 35 Cabot Road, , Woburn, MA 01801-1003; (617) 937-5135 Dr. Roy Gat, Principal Investigator Mr. John M. Tarrh, Business Official DOE Grant No. DE-FG02-97ER82327 Amount: $74,867 There is a great… More

178 A Polycrystalline Pixel Diamond Film Particle Detector--Applied Science and Technology, Inc., 35 Cabot Road, , Woburn, MA 01801-1003; (617) 937-5135 Dr. Mathias Koch, Principal Investigator Mr. John M. Tarrh, Business Official DOE Grant No. DE-FG02-97ER82326 Amount: … More